Patent · US Expired

Wafer-level transfer of membranes in semiconductor processing

US6777312B2 · kind B2 · utility

7Cited by
11References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 2, 2001
Grant dateAug 17, 2004
Priority date—
Expiry dateApr 3, 2022

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81C2203/038
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Techniques for transferring a membrane from one wafer to another wafer to form integrated semiconductor devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.