Micro-electro-mechanical mirror devices having a high linear mirror fill factor
US6778728B2 · kind B2 · utility
58Cited by
11References
134Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2002 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | Dec 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3578
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.