Polybenzoxazole precursor and coating composition using the same
US6780561B2 · kind B2 · utility
4Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2002 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Nov 26, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is a polybenzoxazole precursor having a high purity which does not contain ionic by-products. The above polybenzoxazole precursor comprises a repetitive unit represented by Formula (1): wherein A1 represents a tetravalent aromatic group; N and OH which are bonded to A1 are paired, and the respective pairs of N and OH are bonded to carbons which are adjacent to each other on the same aromatic ring; A2 represents a divalent organic group; and n represents a number of 2 to 300.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.