Workpiece levitation using alternating positive and negative pressure flows
US6781684B1 · kind B1 · utility
Inventor
Key dates
| Filing date | Nov 7, 2000 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Aug 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A support structure utilizes a combination of positive pressure openings and negative pressure openings to precisely position a workpiece, such as a sheet of float glass. The positive pressure openings are supply openings that direct a flow of fluid, such as air, onto the surface of the workpiece. The negative pressure openings are exhaust openings that are used to regulate the leakage of fluid from between the workpiece and the support structure. In the preferred embodiment, the surface of the support structure includes raised regions that surround the exhaust openings and that function as self-regulating pinch valves. This arrangement enables an equilibrium condition to be quickly established and maintained upon placement of the workpiece on the support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.