Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate
US6781735B2 · kind B2 · utility
1Cited by
3References
23Claims
0Family size
Inventors
Key dates
| Filing date | Jan 16, 2002 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Sep 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes two face-to-face freestanding membranes each supported near a top surface on one of two bonded substrates for defining a resonant cavity between the two membranes. Each of the substrates having an entire bulk-portion opposite the cavity etched off as a bulk micro-machining opening extended from each of the membranes through a bottom surface of the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.