High-frequency AC drive for MEM devices
US6781739B1 · kind B1 · utility
2Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2003 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Feb 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G3/34
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
One embodiment disclosed relates to a method for driving a micro electromechanical (MEM) device. The method includes generating a high-frequency AC drive signal that is substantially greater in frequency than a resonance frequency of a movable feature in the MEM device, and modulating the amplitude of the high-frequency AC drive signal. A DC-like displacement of the movable feature in the MEM device is achieved by driving the movable feature using the amplitude modulated high-frequency AC drive signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.