Quick turn around time system and method of use
US6784003B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 8, 2002 |
| Grant date | Aug 31, 2004 |
| Priority date | — |
| Expiry date | Dec 11, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The invention provides a quick turn around time system (QTAT) for locating an optimal arrangement of work orders within a wafer fabrication facility providing: a real time dispatching system having a software rule database; and at least one piece of fabrication equipment having an internal buffer in communication with the software rule database, wherein the real time dispatching system and the at least one piece of fabrication equipment cooperate to optimally prioritize a work order disposed within the internal buffer of the at least one piece of fabrication equipment. A load port reservation system for in-line processing and a plurality of batch editing functions for controlling batch formation is provided. Additionally provided are two alternative methods of using the QTAT to optimally prioritize work orders within the at least one piece of fabrication equipment's internal buffer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.