Patent · US Expired

Methods of making electromechanical three-trace junction devices

US6784028B2 · kind B2 · utility

101Cited by
234References
50Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 28, 2001
Grant dateAug 31, 2004
Priority date—
Expiry dateDec 28, 2021

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/734
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Methods of producing an electromechanical circuit element are described. A lower structure having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (or other electromechanically responsive element) is formed on an upper surface of the lower structure so as to contact the lower support structures. An upper structure is provided over the nanotube ribbon. The upper structure includes upper support structures and an upper electrically conductive element. In some arrangements, the upper and lower electrically conductive elements are in vertical alignment, but in some arrangements they are not.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.