Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses
US6784399B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 9, 2002 |
| Grant date | Aug 31, 2004 |
| Priority date | — |
| Expiry date | Jul 30, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0038
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An EOM Q-switched CO2 laser produces bursts of laser pulses delivered at a high PRF such as 20-140 kHz and having a short high-power spike of about 80-150 ns followed by a lower-power tail of about 0.05-12.0 &mgr;s. The bursts and/or laser pulses can be shaped by controlling the RF pumping duty cycle, the delay between the onset of RF pumping and the initiation of Q-switching, the pulse repetition frequency, and/or the duration of the tail. The bursts of laser pulses can be adapted to facilitate machining of metal layers and/or layers containing materials having disparate vaporization temperatures and/or disparate melting points, such as FR4 or green ceramics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.