Ultrasonic membrane transducer for an ultrasonic diagnostic probe
US6784600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2002 |
| Grant date | Aug 31, 2004 |
| Priority date | — |
| Expiry date | Oct 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K13/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The invention is directed towards structures for use with micro-formed membrane ultrasonic transducers, and methods for fabricating the structures. In one embodiment, the transducer includes a planar member having a piezoelectric material and spaced apart electrodes disposed on the planar member and coupled to the piezoelectric material for applying an electric field to the layer, and an acoustic backing member joined to the electrodes. In another embodiment, the transducer includes a planar member having a piezoelectric material that adjoins a semiconductor material, the semiconductor material having monolithically formed active circuits formed in the layer and coupled to the piezoelectric material. In still another embodiment, the transducer includes a planar member having a piezoelectric material, and an acoustic backing member having an adjoining layer of a semiconductor material having monolithically formed active circuits, the active circuits being coupled to the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.