MEMS optical mirror array
US6784771B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 24, 2002 |
| Grant date | Aug 31, 2004 |
| Priority date | — |
| Expiry date | Jul 24, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A compact high aspect ratio MEMS optical switch, and a process for fabricating same, are disclosed. An outer body portion is mounted so as to have a first rotational degree of freedom about a first axis. An inner body portion is coupled mechanically to the outer body portion so as to have a second rotational degree of freedom relative to the outer body portion about a second axis, the second axis being substantially perpendicular to the first axis and in the plane of the outer body portion. The inner body portion is further coupled to the outer body portion in a manner such that the inner body portion rotates with the outer body portion about the first axis if the outer body is rotated about the first axis, such that the second axis remains substantially in the plane of the outer body portion as the outer body portion rotates about the first axis. An outer electrostatic actuator is configured to rotate the outer body portion about the first axis when an electrostatic force is applied to the outer electrostatic actuator. An inner electrostatic actuator is configured to rotate the inner body portion relative to the outer portion about the second axis when an electrostatic force is ap…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.