Process of making an acceleration detecting element
US6786094B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2001 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Jun 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vibrator includes: a vibrating body; a driving unit for causing the vibrating body to vibrate in a predetermined vibrating direction; and a driving monitoring unit for detecting vibration displacement in a driving direction of the vibrating body. Stabilization of vibration in the driving direction of the vibrating body is achieved by applying positive feedback control to the driving unit based on the state of the vibration displacement in the driving direction of the vibrating body detected by this driving monitoring unit. The driving monitoring unit is constructed and arranged so as to be provided in a barycentric region of the vibrating body to detect the vibration displacement in the driving direction of the barycentric region of the vibrating body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.