Acceleration sensor
US6786095B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 21, 2001 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Sep 21, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0922
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor includes a first resonator and a second resonator which resonate at independent frequencies and each of which includes a piezoelectric body and electrodes arranged on both main surfaces thereof, and a first base plate and a second base plate. A first unimorph type acceleration detection element includes the first resonator bonded to one surface of the first base plate, and a second unimorph type acceleration detection element includes the second resonator bonded to one surface of the second base plate. Each of the first and second unimorph type acceleration detection elements is fixed at one longitudinal end thereof or opposed longitudinal ends thereof such that the first resonator and the second resonator are diametrically opposed to each other or are arranged to face each other to allow the first resonator and the second resonator to independently deflect in response to the application of acceleration. When the two acceleration detection elements are independently deflected in response to the application of acceleration, acceleration is detected by detecting a difference between frequency changes of the first resonator and the second resonator or a differen…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.