Apparatus for the synthesis of layers, coatings or films
US6787012B2 · kind B2 · utility
15Cited by
24References
9Claims
0Family size
Inventor
Key dates
| Filing date | Sep 20, 2001 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Jan 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Systems and methods are described for synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.