Method and device for electronic cyclotronic resonance plasma deposit of carbon nanofibre layers in fabric form and resulting fabric layers
US6787200B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 2, 2002 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Mar 1, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/844
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Process and device for depositing, by electron cyclotron resonance plasma, a web of carbon nanofibres or nanotubes, on a substrate without a catalyst, by injection of a microwave power into a deposition chamber including a magnetic structure with a highly unbalanced magnetic mirror and at least one electron cyclotron resonance zone within the interior of the deposition chamber itself and opposite the substrate. Under a pressure of less than 10−4 mbar, ionization and/or dissociation of a gas containing carbon is induced in the magnetic mirror in the center of the deposition chamber, thus producing species that deposit on the substrate, which is heated. A resulting film, which may be on a substrate, can be formed from a web or a network of interconnected carbon nanofibres or nanotubes, like a spider's web, the film being exempt of a catalyst and a structure of several layers-a multi-layer structure-including at least two layers of a web of carbon nanofibres or nanotubes, as well as filters, electron accelerating or decelerating nanogrids and flat screens including such films or structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.