Patent · US Expired

Semiconductor device having a flat protective adhesive sheet

US6787929B2 · kind B2 · utility

3Cited by
15References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 20, 2001
Grant dateSep 7, 2004
Priority date
Expiry dateFeb 20, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2221/68327
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A semiconductor device has a semiconductor wafer having sensing portions exposed on a surface thereof and an adhesive sheet attached to the semiconductor wafer as a protective cap to cover the sensing portions. The adhesive sheet is composed of a flat adhesive sheet and adhesive disposed generally on an entire surface of the adhesive sheet. Adhesion of the adhesive is selectively reduced by UV irradiation to have adhesion reduced regions, and the adhesion reduced regions face the sensing portions. The protective cap can be produced with high productivity, and securely protect the sensing portions when the semiconductor wafer is diced and is transported.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.