Scanning probe system with spring probe
US6788086B2 · kind B2 · utility
31Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 2003 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Nov 19, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Scanning probe systems, which include scanning probe microscopes (SPMs), atomic force microscope (AFMs), or profilometers, are disclosed that use cantilevered spring (e.g., stressy metal) probes formed on transparent substrates. When released, a free end bends away from the substrate to form the cantilevered spring probe, which has an in-plane or out-of-plane tip at its free end. The spring probe is mounted in a scanning probe system and is used to scan or otherwise probe a substrate surface. The probes are used for topography, electrical, optical and thermal measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.