Touch probe with deflection measurement and inspection optics

US6789327B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Roland Roth · Schwäbisch Gmünd, DE
• Karl Seitz · Oberwil, CH
• Kurt Brenner · Satteldorf, DE
• Uwe Brand · Hersbruck, DE
• Wolfgang Hoffmann · Lippstadt, DE
• Thomas Kleine-Besten · Braunschweig, DE
• Sebastian Bütefisch · Braunschweig, DE
• Stephanus Büttgenbach · Sickte, DE

Key dates

• Filing date: Aug 22, 2003
• Grant date: Sep 14, 2004
• Expiry date: Aug 22, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/007
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A touch probe 9 for a coordinate measuring apparatus is proposed which includes a touch probe chassis 29 adapted to be attached to the coordinate measuring apparatus, a support for the sensing stylus 39 which is mounted on the touch probe chassis 29 so as to be deflectable from a rest position and on which a sensing stylus 47 is mountable for contacting a workpiece 17, a deflection measuring system 55, 57 for detecting a deflection of the support for the sensing stylus 39 with respect to the touch probe chassis 29 and an inspection optics 61 for inspecting a tip 49 of the sensing stylus 47. The touch probe 1 is characterized in that at least one of the components support for the sensing stylus 39 and touch probe chassis 29 comprises a transverse support 39 which extends transversely to a direction of extension of the sensing stylus 47 and which is transparent to light in at least a portion thereof and which is disposed in a beam path 69 of the inspection optics 61.