Josephson device and fabrication process thereof
US6790675B2 · kind B2 · utility
5Cited by
12References
9Claims
0Family size
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Key dates
| Filing date | Mar 18, 2003 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Mar 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49014
Abstract
A method of fabricating a Josephson device includes the steps of forming a first superconducting layer and forming a second superconducting layer to form a Josephson junction therebetween, wherein the step of forming the second superconducting layer includes the steps of conducting a first step of forming the second superconducting layer with improved uniformity and conducting a second step of forming the second superconducting layer on the second superconducting layer formed in the first step with improved film quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.