Patent · US Expired

Semiconductor device and manufacturing method of the same

US6791195B2 · kind B2 · utility

80Cited by
7References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateApr 23, 2001
Grant dateSep 14, 2004
Priority date
Expiry dateAug 24, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/351
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Semiconductor device 3 comprises semiconductor chip 11, Au ball bumps 21 formed on pad electrodes 12 with a stud bump method, and thermoplastic adhesive layer 22 provided on the surface of semiconductor chip 11 on which pad electrodes 12 are formed, in which the tops of Au ball bumps 21 project from the surface of adhesive layer 22. Reliable bonding can be realized by forming the bumps for electrical connection and the adhesive resin having an adhesion function on the semiconductor chip. In addition, the present invention provides a method of bonding a copper foil to a semiconductor wafer to form a wiring pattern, a multi chip module in which electrical connection is established by bumps bonded to each other through an adhesive layer, and the like.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.