Radial power megasonic transducer
US6791242B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2002 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Nov 7, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R23/00
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy in the frequency range of 0.4 to 2.0 MHz, and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise a wedge shaped piezoelectric crystal. A resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.