Patent · US Expired

Material delivery system for miniature structure fabrication

US6792326B1 · kind B1 · utility

20Cited by
7References
26Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 19, 2001
Grant dateSep 14, 2004
Priority date
Expiry dateJan 19, 2021

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB33Y50/02
  • WIPO fieldOther special machines
  • WIPO sectorMechanical engineering

Abstract

A material delivery system is provided for miniature structures fabrication which has a substrate, a material carrier having a deposition layer, and a laser beam directed towards the material carrier element. A control unit is operatively coupled to the substrate, the material carrier element and laser beam for exposing respective areas of the deposition layer to the laser beam in a patterned manner so that the depositable material of the deposition layer is transferred to the substrate surface for deposition on its surface. The system operates in either an additive mode of operation, or a subtractive mode of operation so that a workpiece does not have to be removed from the tool when change of modes of operation takes place.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.