Diagnostic test for a resonant micro electro mechanical system
US6792792B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 31, 2002 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | May 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A balanced resonant micro electromechanical system angular rate sensor includes a feedback control loop that generates a null signal to rebalance the sense element to cancel any a Coriolis force induced displacement of the proof mass. The null signal is proportional to the Coriolis force and is used as the sensor output signal. A test signal is injected into the null signal feedback control loop. The resulting sensor output signal is a function of the test signal. If there is no change in the output signal following the injection of the test signal or if the output signal resulting from the test signal exceeds a predetermined threshold, the sensor is defective. Because the test signal is used to cancel the proof mass displacement, the test verifies operation of the sensor element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.