Patent · US Expired

Tube target

US6793784B1 · kind B1 · utility

3Cited by

6References

4Claims

0Family size

Assignee

W.C. Heraeus GmbH & Co. KG · DE

Inventors

Otto Bach · Schöneck, DE
David Francis Lupton · Gelnhausen, DE
Hans Bohmeier · Freiberg, DE
Ralf Heck · Hanau, DE

Key dates

Filing date	Nov 6, 2000
Grant date	Sep 21, 2004
Priority date	—
Expiry date	Oct 13, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3491
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A tube target for cathode sputtering installations, and a process for producing a cylindrical hollow body for such a tube target and its use. The problem of providing a simple and low-cost process for producing a cylindrical hollow body for a tube target and of providing a cylindrical hollow body with a uniform, fine-grained structure is solved by the cylindrical hollow body being produced by centrifugal casting of a melt.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.