Patent · US Expired

Organic thin-film semiconductor element and manufacturing method for the same

US6794220B2 · kind B2 · utility

47Cited by
9References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 29, 2002
Grant dateSep 21, 2004
Priority date
Expiry dateSep 3, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K85/113
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

There is described an organic thin-film transistor including an active layer made of organic semiconductor and a manufacturing method for the organic thin-film transistor. In particular, the invention concerns an organic thin-film transistor capable of being formed on a flexible base board made of a polymer material and a manufacturing method for the same. The organic semiconductor device, includes a drain electrode; a source electrode; a gate electrode; a channel that is made of an organic semiconductor material and is disposed between the drain electrode and the source electrode; and an insulation film that is disposed between the gate electrode and the channel; wherein the insulation film is formed under an atmospheric pressure environment by employing a plasma processing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.