Adaptive tolerance reference inspection system
US6795186B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2002 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | May 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/302
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method and apparatus for automatically optically inspecting electrical circuits by matching portions of an electrical circuit being inspected to corresponding portions in a reference, wherein an adaptive spatial tolerance representing a permissible deviation in the location of corresponding portions is applied to a portion. The spatial tolerances for each portion is in part a function of a characteristic of the portion, for example one or more of: the proximity of the portion to other portions of predetermined type, a spatial location of the portion in an electrical circuit, a material from which the portion is formed, the color of the portion and the intensity of light reflected by the portion. Non-defective matching portions an electrical circuit being inspected and in a reference must be separated by a distance which is less than the adaptive spatial tolerance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.