Micromirror unit with torsion connector having nonconstant width
US6795225B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 31, 2001 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | Oct 31, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.