Thermal convection accelerometer with closed-loop heater control
US6795752B1 · kind B1 · utility
17Cited by
19References
25Claims
0Family size
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Key dates
| Filing date | Nov 3, 2000 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | Jan 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated convective accelerometer device. The device includes a thermal acceleration sensor having a thermopile and a heater element; control circuitry for providing closed-loop control of the thermopile common-mode voltage; an instrumentation amplifier; clock generation circuitry; voltage reference circuitry; a temperature sensor; and, output amplifiers. The device can be operated in an absolute or ratiometric mode. Further, the device is formed in a silicon substrate using standard semiconductor processes and is packaged in a standard integrated circuit package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.