Split-resonator integrated-post MEMS gyroscope
US6796179B2 · kind B2 · utility
35Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2003 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | May 16, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.