Illumination delivery system
US6796697B1 · kind B1 · utility
21Cited by
10References
59Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2002 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | May 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An illumination delivery system provides a spatially and angularly uniform shaped beam output with sufficient intensity to illuminate a sample surface for defect inspection. Light is transmitted through a shaped fiber optic bundle, a homogenizer, a diffuser, and an optional focusing optics system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.