Process for producing thin metal oxide film
US6797338B2 · kind B2 · utility
13Cited by
19References
16Claims
0Family size
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Key dates
| Filing date | Jul 8, 2003 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | Jul 8, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/32
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process for forming a thin metal oxide film is disclosed that comprises molding an amorphous powder of organic metal chelate complexes to obtain a target. The process also includes subjecting the target to a PVD process that forms the thin metal oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.