Flexure with integral electrostatic actuator
US6798113B2 · kind B2 · utility
4Cited by
5References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 2002 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | Jun 2, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B7/0012
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A flexure for a micro-electro-mechanical device includes a longitudinal beam. An actuator integral to the beam acts to flex the beam when activated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.