Microelectromechanical system (MEMS) analog electrical isolator
US6798312B1 · kind B1 · utility
4Cited by
82References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2001 |
| Grant date | Sep 28, 2004 |
| Priority date | — |
| Expiry date | Nov 11, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/24181
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical system (MEMS) analog isolator may be created in which an actuator such as an electrostatic motor drives a beam against an opposing force set, for example, by another electrostatic motor. Motion of the beam may be sensed by a sensor also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.