Method and device for plasma coating surfaces

US6800336B1 · kind B1 · utility

Inventors

• Peter Fornsel · Spenge, DE
• Christian Buske · Bielefeld, DE
• Uwe Hartmann · Stuttgart, DE
• Alfred Baalmann · Oyten, DE
• Guido Ellinghorst · Overath, DE
• Klaus-Dieter Vissing · Wyk auf Föhr, DE

Key dates

• Filing date: Apr 29, 2002
• Grant date: Oct 5, 2004
• Expiry date: Apr 29, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/34
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for coating surfaces, for which a precursor material is caused to react with the help of plasma and the reaction product is deposited on a surface, the reaction as well as the deposition taking place at atmospheric pressure, such that a plasma jet is generated by passing a working gas through an excitation zone and the precursor material is supplied with a lance separately from the working gas to the plasma jet.