Mesoscale MEMS switch apparatus and method
US6800820B1 · kind B1 · utility
3Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2003 |
| Grant date | Oct 5, 2004 |
| Priority date | — |
| Expiry date | Jun 18, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plurality of mesoscale MEMS switches each share a common control voltage potential electrode (such as ground). So configured, a large number of switches can be provided without incurring a significant increase in required actuation voltage. Such switches can be inter-coupled in a variety of ways. In addition, in one embodiment, stacked switches can be provided. If desired, such stacked switches can share a common movable conductive switch element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.