Liquid phase growth methods and liquid phase growth apparatus
US6802900B2 · kind B2 · utility
9Cited by
12References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 20, 2001 |
| Grant date | Oct 12, 2004 |
| Priority date | — |
| Expiry date | Dec 20, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B19/08
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are a liquid phase growth method including a step of immersing a substrate in a crucible storing a solvent having a growth material dissolved therein; and a step of cooling the solvent from an interior thereof, and a liquid phase growth apparatus for use in the method, by which a temperature difference of a solution is decreased and by which a deposited film is formed in a uniform thickness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.