Microelectromechanical system (MEMS) with improved beam suspension
US6803755B2 · kind B2 · utility
21Cited by
73References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2001 |
| Grant date | Oct 12, 2004 |
| Priority date | — |
| Expiry date | Apr 5, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/051
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.