MEMS structure with mechanical overdeflection limiter

US6805454B2 · kind B2 · utility

Assignee

• Glimmerglass Networks, Inc.

Inventors

• Bryan P. Staker · Pleasanton, US
• James Spallas · San Ramon, US
• Lawrence P. Muray · Moraga, US
• Andres Fernandez · San Francisco, US

Key dates

• Filing date: Jul 22, 2003
• Grant date: Oct 19, 2004
• Expiry date: Jul 22, 2023

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/042
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS device having a fixed element and a movable element wherein one or the other of the fixed element and the movable element has at least one radially-extended stop or overdeflection limiter. A fixed overlayer plate forms an aperture. The aperture is sized to minimize vignetting and may be beveled on the margin. Overdeflection limitation occurs during deflection before the movable element can impinge on an underlying electrode. The overdeflection limiter may be conveniently placed adjacent a gimbaled hinge.