Method and apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition
US6805751B2 · kind B2 · utility
16Cited by
19References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 23, 2001 |
| Grant date | Oct 19, 2004 |
| Priority date | — |
| Expiry date | Nov 16, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B7/0042
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and apparatus for removing minute particles from a surface of a sample are provided that prevent redeposition of the particles onto the surface. By combining thermophoresis with laser assisted particle removal (LAPR), the methods and apparatus remove minute particles (for example, micrometer and nanometer sizes) and assure that they will not redeposit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.