Response microcantilever thermal detector
US6805839B2 · kind B2 · utility
13Cited by
6References
19Claims
0Family size
Inventors
Key dates
| Filing date | Mar 16, 2001 |
| Grant date | Oct 19, 2004 |
| Priority date | — |
| Expiry date | Mar 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/601
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A “folded leg” thermal detector microcantilever constructed of a substrate with at least one leg interposed between a fixed end and a deflective end, each leg having at least three essentially parallel leg segments interconnected on alternate opposing ends and aligned in a serpentine pattern with only the first leg segment attached to the fixed end and only the last leg segment attached to the deflective end. Alternate leg segment are coated on the pentalever with coating applied to the top of the first, third, and fifth leg segments of each leg and to the bottom of the second and fourth leg segments of each leg.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.