Step-eliminating film and island-shaped pattern composed of conductive film for a reflective electrooptic device and electronic apparatus
US6806927B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 14, 2003 |
| Grant date | Oct 19, 2004 |
| Priority date | — |
| Expiry date | Jan 14, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/48
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides a reflective electrooptic device and an electronic apparatus using the reflective electrooptic device described above. In the reflective electrooptic device, variation in irregular shape is avoided or reduced by maintaining uniform conditions at the lower layer side of an irregularity-forming layer when being formed by a photolithographic technique. In a TFT array substrate of a reflective electrooptic device, an irregularity-forming layer to form an irregular pattern on a light reflection film is formed by half exposure, development, and heating performed for a photosensitive resin. At a lower layer side of the irregularity-forming layer, since a height difference, i.e., a step is eliminated by a step-eliminating film, exposure can be preferably performed for the photosensitive resin. In addition, since the height difference is eliminated, variation in thickness of the photosensitive resin is small, and hence variation in irregular shape becomes small.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.