Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer
US6806992B2 · kind B2 · utility
12Cited by
9References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 31, 2002 |
| Grant date | Oct 19, 2004 |
| Priority date | — |
| Expiry date | Dec 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro mirror unit includes a micro mirror substrate, a wiring substrate and an electroconductive spacer disposed between these substrates. The micro mirror substrate includes a moving part, a frame and torsion bars connecting the moving part to the frame. The moving part is provided with a mirror-formed portion. The wiring substrate is formed with a wiring pattern. The electroconductive spacer electrically connects the frame to the wiring pattern, while also providing a space between the micro mirror substrate and the wiring substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.