Modified blades for process chamber throttle valve
US6808163B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2003 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Apr 14, 2023 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The valve blades of the present invention facilitate delayed onset and gradual or fine variations in the flow of gas through the throttle valve to achieve a process interval of interior chamber gas pressures over a broader valve blade step range, achieve aggressive PI over a broad range for enhanced tool throughput, enhance stability of interior chamber gas pressures during substrate processing, and increase tool uptime and production efficiency. In one embodiment, each of the two valve blades in the throttle valve includes at least one, and typically, multiple notches or gaps for a delayed onset, and finely-graded increase, in flow of gas through the valve throughout the step range of the valve blades. In another embodiment, the semicircular valve blades have a cam-shaped configuration and are capable of varying the radius of the circle defined by the two blades.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.