Microactuator having a ferromagnetic substrate
US6809436B2 · kind B2 · utility
4Cited by
13References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2003 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Mar 14, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electromagnetic microactuator having a ferromagnetic substrate, preferably steel. A plurality of layers are deposited upon the substrate including an insulating layer, a seed layer and first and second photoresist layers. The first photoresist layer provides a coil well which defines the deposition location of a coil metal. The second photoresist layer provides central and peripheral core wells which define the deposition locations of a central core and a peripheral core, respectively. The second photoresist layer intersticially fills and protectively covers the coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.