Field emission device and method for fabricating the same
US6809464B2 · kind B2 · utility
4Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2001 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Nov 12, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30446
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission device (FED) and a method for fabricating the FED are provided. The FED includes micro-tips with nano-sized surface features. Due to the micro-tips as a collection of a large number of nano-tips, the FED is operable at low gate turn-on voltages with high emission current densities, thereby lowering power consumption.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.