Article comprising MEMS-based two-dimensional e-beam sources and method for making the same
US6809465B2 · kind B2 · utility
133Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 24, 2003 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Jan 24, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/939
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In accordance with the invention, an electron beam source for exposing selected portions of a surface to electrons comprises a plurality of nanoscale electron emitters and, associated with each electron emitter, a directional control element to direct the emitter toward a selected portion of the surface. In a preferred embodiment, the emitters are nanotubes or nanowires mounted on electrostatically controlled MEMS directional control elements. An alternative embodiment uses electrode directional control elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.