Quantitative imaging of dielectric permittivity and tunability
US6809533B1 · kind B1 · utility
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23Claims
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Key dates
| Filing date | Mar 1, 2002 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Mar 1, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/2664
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A near-field scanning microwave microscope images the permittivity and dielectric tunability of bulk and thin film dielectric samples on a length scale of about 1 micron or less. The microscope is sensitive to the linear permittivity, as well as to non-linear dielectric terms, which can be measured as a function of an applied electric field. A versatile finite element model is used for the system, which allows quantitive results to e obtained. The technique is non-destructive and has broadband (0.1-50 GHz) capability.
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