Method and apparatus for automating a microelectronic manufacturing process
US6810294B2 · kind B2 · utility
12Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2002 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Aug 16, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.