Hydraulically amplified PZT mems actuator
US6811133B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 14, 2002 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | Jan 18, 2023 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0084
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.