Patent · US Expired

Microelectronic spring with additional protruding member

US6811406B2 · kind B2 · utility

226Cited by
31References
49Claims
0Family size

Assignee

Inventor

Key dates

Filing dateApr 12, 2001
Grant dateNov 2, 2004
Priority date
Expiry dateApr 12, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Various structural features for modifying the performance characteristic of cantilevered microelectronic spring structures are disclosed. Generally, the features comprise a protruding member mounted between a supporting substrate and the transverse cantilever beam of a microelectronic spring structure, at a distance spaced apart from the supporting structure from which the beam is cantilevered. The protruding member may be equal to the clearance under the beam, less than the clearance under the beam, or adjustable in height; and may be attached or mounted to either the beam or the substrate. The protruding member may include an adjustable pressure device or an electronic element. The protruding member may induce a reverse wipe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.